A Si-micromachined 48-stage Knudsen pump for on-chip vacuum
نویسندگان
چکیده
منابع مشابه
A Si-micromachined 48-stage Knudsen pump for on-chip vacuum
This paper describes a thermal transpiration-driven multistage Knudsen pump for vacuum pumping applications. This type of pump relies upon the motion of gas molecules from the cold end to the hot end of a channel in which the flow is restricted to the free molecular or transitional regimes. To achieve a high compression ratio, 48 stages are cascaded in series in a single chip. A five-mask, sing...
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This paper presents a simulation model for a silicon micromachined Knudsen pump that combines analytical and numerical methods. It involves numerical modeling of the thermal response, followed by an analytical estimate of the pumping using Kennard’s model. The loss of performance resulting from gas diffusion though walls of the pump is specifically addressed. The results are subsequently valida...
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Micromachined vacuum pumps are one of the key components in miniature systems for chemical and biological analysis. Miniature sensors and analyzers are normally operated at the pressure range lower than a few millitorr. We are developing a micromachined vacuum pump that is comprised of a mechanical rough pump integrated with micromachined ion-pumps. The rough pump generates a low vacuum of tens...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2012
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/22/10/105026